Inductively coupled plasma etching of CoFeB, CoZr, CoSm and FeMn thin films in interhalogen mixtures

Cho, H. / Jung, K.B. / Hays, D.C. et al. | British Library Online Contents | 1999

Black germanium produced by inductively coupled plasma etching

Schicho, S. / Jaouad, A. / Sellmer, C. et al. | British Library Online Contents | 2013

Reactive ion etching of FePt using inductively coupled plasma

Kanazawa, T. / Ono, K. / Takenaka, M. et al. | British Library Online Contents | 2008

Optimization of inductively coupled plasma deep etching of GaN and etching damage analysis

Qiu, R. / Lu, H. / Chen, D. et al. | British Library Online Contents | 2011

Inductively coupled plasma etching of GaN using Cl2/He gases

Lin, Y. C. / Chang, S. J. / Su, Y. K. et al. | British Library Online Contents | 2003