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The evolution of hydrogen molecule formation in hydrogen-plasma-treated Czochralski silicon
The evolution of hydrogen molecule formation in hydrogen-plasma-treated Czochralski silicon
The evolution of hydrogen molecule formation in hydrogen-plasma-treated Czochralski silicon
Job, R. (Autor:in) / Ulyashin, A. G. (Autor:in) / Fahrner, W. R. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 257-260
01.01.2001
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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