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Thermal donor formation in direct-plasma hydrogenated n-type Czochralski silicon
Thermal donor formation in direct-plasma hydrogenated n-type Czochralski silicon
Thermal donor formation in direct-plasma hydrogenated n-type Czochralski silicon
Simoen, E. (author) / Claeys, C. (author) / Rafi, J. M. (author) / Ulyashin, A. G. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 134 ; 189-192
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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