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Impact of Annealing Temperature Ramps on the Electrical Activation of N^+ and P^+ Co-Implanted SiC Layers
Impact of Annealing Temperature Ramps on the Electrical Activation of N^+ and P^+ Co-Implanted SiC Layers
Impact of Annealing Temperature Ramps on the Electrical Activation of N^+ and P^+ Co-Implanted SiC Layers
Blanque, S. (Autor:in) / Perez, R. (Autor:in) / Mestres, N. (Autor:in) / Contreras, S. (Autor:in) / Camassel, J. (Autor:in) / Godignon, P. (Autor:in) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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