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Investigation of Two-Stage Activation Annealing of Al-Implanted 4H-SiC Layers
Investigation of Two-Stage Activation Annealing of Al-Implanted 4H-SiC Layers
Investigation of Two-Stage Activation Annealing of Al-Implanted 4H-SiC Layers
Merrett, J. N. (Autor:in) / Scofield, J. D. (Autor:in) / Tsao, B. H. (Autor:in) / Mazzola, M. (Autor:in) / Seale, D. (Autor:in) / Draper, W. A. (Autor:in) / Sankin, I. (Autor:in) / Casady, J. B. (Autor:in) / Bondarenko, V. (Autor:in)
MATERIALS SCIENCE FORUM ; 457/460 ; 921-924
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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