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Process Optimisation for <11-20> 4H-SiC MOSFET Applications
Process Optimisation for <11-20> 4H-SiC MOSFET Applications
Process Optimisation for <11-20> 4H-SiC MOSFET Applications
Blanc, C. (Autor:in) / Tournier, D. (Autor:in) / Godignon, P. (Autor:in) / Brink, D. J. (Autor:in) / Souliere, V. (Autor:in) / Camassel, J. (Autor:in) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
Silicon Carbide and Related Materials - 2005 ; 1051-1054
MATERIALS SCIENCE FORUM ; 527/529
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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