Modification of silicon waveguide structures using ion implantation induced defects

Knights, A. P. / Dudeck, K. J. / Walters, W. D. et al. | British Library Online Contents | 2008

Annihilation kinetics of defects induced by phosphorus ion implantation in silicon

Hadjersi, T. | British Library Online Contents | 2001

Isochronal annealing study of hydrogen interaction with implantation-induced point defects in p-type silicon

Tokuda, Y. / Sato, H. | British Library Online Contents | 2003

Role of Implantation-Induced Defects in Surface-Oriented Diffusion of Fluorine in Silicon

Szeles, C. / Nielsen, B. / Asoka-Kumar, P. et al. | British Library Online Contents | 1995

Ion implantation induced defects in epitaxial 4H-SiC

Hallen, A. / Henry, A. / Pellegrino, P. et al. | British Library Online Contents | 1999