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Electrical characteristics of oxygen precipitation related defects in Czochralski silicon wafers

Kirscht, F. G. / Furukawa, Y. / Seifert, W. et al. | British Library Online Contents | 1996

Effect of Rapid Thermal Processing on Oxygen Precipitation in Czochralski Silicon Subjected to Simulating CMOS Thermal Processing

Ma, Q. / Yang, D.-r. / Ma, X.-y. et al. | British Library Online Contents | 2006

Investigation of oxygen precipitation related crystal defects in processed silicon wafers by infrared light scattering tomography

Kissinger, G. / Vanhellemont, J. / Simoen, E. et al. | British Library Online Contents | 1996

Influence of Oxygen on External Phosphorus Gettering in Disordered Silicon Wafers

Martinuzzi, S. / Perichaud, I. | British Library Online Contents | 1993