Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD

Vassallo, E. / Cremona, A. / Ghezzi, F. et al. | British Library Online Contents | 2006

Optical properties and local atomic order in non hydrogenated amorphous silicon carbonitride films

Doucey, B. / Cuniot, M. / Moudni, R. et al. | British Library Online Contents | 2002

Plasmochemical deposition of amorphous hydrogenated silicon films

Bosyakov, M. N. / Grunskii, D. I. / Dostanko, A. P. | British Library Online Contents | 1999

Laser annealing study of PECVD deposited hydrogenated amorphous silicon carbon alloy films

Coscia, U. / Ambrosone, G. / Gesuele, F. et al. | British Library Online Contents | 2007

Plasma Enhanced Chemical Vapor Deposition and Characterization of Hydrogenated Amorphous SiC Films on Si

Wang, Y. / Lin, J. / Feng, Z. C. et al. | British Library Online Contents | 2000