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Set of equations for transient enhanced diffusion in shallow ion-implanted layers
Set of equations for transient enhanced diffusion in shallow ion-implanted layers
Set of equations for transient enhanced diffusion in shallow ion-implanted layers
Velichko, O. I. (Autor:in) / Shaman, Y. P. (Autor:in) / Fedotov, A. K. (Autor:in) / Masanik, A. V. (Autor:in)
COMPUTATIONAL MATERIALS SCIENCE ; 43 ; 279-285
01.01.2008
7 pages
Aufsatz (Zeitschrift)
Englisch
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