Photoresist Templates for Wafer Scale Defect Free Evaporative Lithography

Tang, X. / O Shea, S. J. / Vakarelski, I. U. | British Library Online Contents | 2010

Fabrication of micro-structures on a PVDF/TiO2 nano-composite film using photocatalytic lithography

An, N. / Liu, H. / Ding, Y. et al. | British Library Online Contents | 2012

A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology

Kim, J. W. / Yamagata, Y. / Morita, S. et al. | British Library Online Contents | 2003

Fabrication of ZnO micro- and nano-structures by electrodeposition using nanoporous and lithography defined templates

Leprince-Wang, Y. / Bouchaib, S. / Brouri, T. et al. | British Library Online Contents | 2010

Influences of water on photoresist surface in immersion lithography technology

Sado, M. / Teratani, T. / Fujii, H. et al. | British Library Online Contents | 2008