A platform for research: civil engineering, architecture and urbanism
Fabrication of suspended micro-structures using diffsuser lithography on negative photoresist
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 22 ; 1765-1771
2008-01-01
7 pages
Article (Journal)
English
DDC:
621
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Fabrication of micro-structures on a PVDF/TiO2 nano-composite film using photocatalytic lithography
British Library Online Contents | 2012
|Photoresist Templates for Wafer Scale Defect Free Evaporative Lithography
British Library Online Contents | 2010
|British Library Online Contents | 2003
|British Library Online Contents | 2010
|Influences of water on photoresist surface in immersion lithography technology
British Library Online Contents | 2008
|