Low Temperature Selective and Lateral Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates

Jacob, C. / Pirouz, P. / Nishino, S. | British Library Online Contents | 2001

Selective Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates Using Hexachlorodisilane and Propane

Jacob, C. / Hong, M.-H. / Chung, J. et al. | British Library Online Contents | 2000

Orientation-Dependent Defect Formation in Silicon Carbide Epitaxial Layers

Yakimova, R. / Syvajarvi, M. / Iakimov, T. et al. | British Library Online Contents | 2003

Silicon Carbide Substrates for Epitaxial Growth of Aluminium Nitride by Chloride-Transport Process

Avrov, D. D. / Dorozhkin, S. I. / Lebedev, A. O. et al. | British Library Online Contents | 2000

Thermal Oxidation of Silicon Carbide Substrates

Chen, X. / Ning, L. / Wang, Y. et al. | British Library Online Contents | 2009