Growth of Low Basal Plane Dislocation Density SiC Epitaxial Layers

Zhang, Z. H. / Sudarshan, T. S. | British Library Online Contents | 2006

Demonstration of High Quality 4H-SiC Epitaxial Growth with Extremely Low Basal Plane Dislocation Density

Tanaka, T. / Kawabata, N. / Mitani, Y. et al. | British Library Online Contents | 2014

Basal Plane Dislocation Mitigation in 8^o Off-Cut 4H-SiC through In Situ Growth Interrupts during Chemical Vapor Deposition

VanMil, B.L. / Stahlbush, R.E. / Myers-Ward, R.L. et al. | British Library Online Contents | 2009

Evolution of Basal Plane Dislocations during 4H-SiC Epitaxial Growth

Stahlbush, R.E. / Van Mil, B.L. / Liu, K.X. et al. | British Library Online Contents | 2009

Growth of Low Basal Plane Dislocation Density 4H-SiC Crystals in Controlled Temperature Distribution inside the Crucible

Tsuge, H. / Ushio, S. / Sato, S. et al. | British Library Online Contents | 2013