Growth of Thick 4H-SiC Epitaxial Layers on On-Axis Si-Face Substrates with HCl Addition

Leone, S. / Pedersen, H. / Henry, A. et al. | British Library Online Contents | 2009

4H-SiC Epitaxial Layers Grown on On-Axis Si-Face Substrate

Hassan, J. / Bergman, J. P. / Henry, A. et al. | British Library Online Contents | 2007

Progress in Growth of Thick Epitaxial Layers on 4 Degree Off-Axis 4H SiC Substrates

Zhang, J. / Chung, G. / Sanchez, E.K. et al. | British Library Online Contents | 2012

4H-SiC Epitaxial Growth on Carbon-Face Substrates with Reduced Surface Roughness

Aigo, T. / Sawamura, M. / Fujimoto, T. et al. | British Library Online Contents | 2006

4H-SiC Epitaxial Growth on 2^o Off-Axis Substrates using Trichlorosilane (TCS)

Aigo, T. / Ito, W. / Tsuge, H. et al. | British Library Online Contents | 2012