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Cubic Silsesquioxanes as a Green, High Performance Mold Material for Nanoimprint Lithography
Cubic Silsesquioxanes as a Green, High Performance Mold Material for Nanoimprint Lithography
Cubic Silsesquioxanes as a Green, High Performance Mold Material for Nanoimprint Lithography
Ro, H. W. (Autor:in) / Popova, V. (Autor:in) / Chen, L. (Autor:in) / Forster, A. M. (Autor:in) / Ding, Y. (Autor:in) / Alvine, K. J. (Autor:in) / Krug, D. J. (Autor:in) / Laine, R. M. (Autor:in) / Soles, C. L. (Autor:in)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 23 ; 414-420
01.01.2011
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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