Photocatalytic characteristics of hydro-oxygenated amorphous titanium oxide films prepared using remote plasma enhanced chemical vapor deposition

Hatanakaa, Y. / Naitob, H. / Itouc, S. et al. | British Library Online Contents | 2005

Structural properties of SiO2 films prepared by plasma-enhanced chemical vapor deposition

Iacona, F. / Ceriola, G. / La Via, F. | British Library Online Contents | 2001

The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition

Grannen, K. J. / Xiong, F. / Chang, R. P. H. | British Library Online Contents | 1994

Laser Doping and Recrystallization for Amorphous Silicon Films by Plasma-Enhanced Chemical Vapor Deposition

Wuu, D. S. / Lien, S. Y. / Wang, J. H. et al. | British Library Online Contents | 2005

Plasma Enhanced Chemical Vapor Deposition and Characterization of Hydrogenated Amorphous SiC Films on Si

Wang, Y. / Lin, J. / Feng, Z. C. et al. | British Library Online Contents | 2000