Patterning at the nanoscale: Atomic force microscopy and extreme ultraviolet interference lithography

Parisse, P. / Luciani, D. / D'Angelo, A. et al. | British Library Online Contents | 2009

Metal layer mask patterning by force microscopy lithography

Filho, H. D. / Mauricio, M. H. / Ponciano, C. R. et al. | British Library Online Contents | 2004

Local Anodic Oxidation of Phosphorus-Implanted 4H-SiC by Atomic Force Microscopy

Lee, J.H. / Ahn, J.J. / Hallen, A. et al. | British Library Online Contents | 2012

Atomic force microscopy evidence of patterning urethane/urea copolymers

Godinho, M. H. / Melo, L. V. / Brogueira, P. | British Library Online Contents | 2003

Nanoscale materials patterning and engineering by atomic force microscopy nanolithography

Xie, X. N. / Chung, H. J. / Sow, C. H. et al. | British Library Online Contents | 2006