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Carbon-Cap for Ohmic Contacts on n-Type Ion Implanted 4H-SiC
Carbon-Cap for Ohmic Contacts on n-Type Ion Implanted 4H-SiC
Carbon-Cap for Ohmic Contacts on n-Type Ion Implanted 4H-SiC
Nipoti, R. (Autor:in) / Mancarella, F. (Autor:in) / Moscatelli, F. (Autor:in) / Rizzoli, R. (Autor:in) / Zampolli, S. (Autor:in) / Monakhov, E.V. / Hornos, T. / Svensson, B.G.
01.01.2011
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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