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Carbon-Cap for Ohmic Contacts on n-Type Ion Implanted 4H-SiC
Carbon-Cap for Ohmic Contacts on n-Type Ion Implanted 4H-SiC
Carbon-Cap for Ohmic Contacts on n-Type Ion Implanted 4H-SiC
Nipoti, R. (author) / Mancarella, F. (author) / Moscatelli, F. (author) / Rizzoli, R. (author) / Zampolli, S. (author) / Monakhov, E.V. / Hornos, T. / Svensson, B.G.
2011-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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