Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide

Zolnai, Z. / Khanh, N. Q. / Lohner, T. et al. | British Library Online Contents | 2003

Beryllium Implantation Doping of Silicon Carbide

Henkel, T. / Tanaka, Y. / Kobayashi, N. et al. | British Library Online Contents | 2000

Doping of Silicon Carbide by Ion Implantation

Svensson, B. G. / Hallen, A. / Linnarsson, M. K. et al. | British Library Online Contents | 2001

Reactive Ion Etching Induced Surface Damage of Silicon Carbide

Xia, J. H. / Rusli / Gopalakrishan, R. et al. | British Library Online Contents | 2005

Macrodefects in Cubic Silicon Carbide Crystals

Jokubavicius, V. / Palisaitis, J. / Vasiliauskas, R. et al. | British Library Online Contents | 2010