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Influence of ion energy on damage induced by Au-ion implantation in silicon carbide single crystals

Gentils, A. l. / Linez, F. / Canizarès, A. l. / Simon, P. / Thomé, L. / Barthe, M. F.

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Influence of ion energy on damage induced by Au-ion implantation in silicon carbide single crystals

Gentils, A. l. / Linez, F. / Canizarès, A. l. / Simon, P. / Thomé, L. / Barthe, M. F.

Influence of ion energy on damage induced by Au-ion implantation in silicon carbide single crystals

Gentils, A. l. / Linez, F. / Canizarès, A. l. / Simon, P. / Thomé, L. / Barthe, M. F.

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Title:

Influence of ion energy on damage induced by Au-ion implantation in silicon carbide single crystals

Contributors:

Gentils, A. l. (author) / Linez, F. (author) / Canizarès, A. l. (author) / Simon, P. (author) / Thomé, L. (author) / Barthe, M. F. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 46 ; 6390-6395

Publication date:

2011-01-01

Size:

6 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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