The optical properties of silicon-rich silicon nitride prepared by plasma-enhanced chemical vapor deposition

Yoshinaga, Seiya / Ishikawa, Yasuaki / Kawamura, Yusuke et al. | British Library Online Contents | 2019

Structural and photo-luminescence properties of nanocrystalline silicon films deposited at low temperature by plasma-enhanced chemical vapor deposition

Ali, A. M. / Inokuma, T. / Hasegawa, S. | British Library Online Contents | 2006

Hot-filament-enhanced chemical vapor deposition of silicon oxide films

Chavez, F. / Bravo-Garcia, Y. E. / Silva-Andrade, F. et al. | British Library Online Contents | 2000

Secondary ion species containing nitrogen atoms from plasma-enhanced chemical vapor deposited silicon oxide films on silicon

Chiba, K. / Tsuji, Y. | British Library Online Contents | 2008

Silicon-germanium films deposited by low-frequency plasma-enhanced chemical vapor deposition: Effect of H~2 and Ar dilution

Kosarev, A. / Torres, A. / Hernandez, Y. et al. | British Library Online Contents | 2006