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Single-Crystal SiC Resonators by Photoelectrochemical Etching
Single-Crystal SiC Resonators by Photoelectrochemical Etching
Single-Crystal SiC Resonators by Photoelectrochemical Etching
Islam, M.M. (author) / Huang, C.F. (author) / Zhao, F. (author)
MATERIALS SCIENCE FORUM ; 717/720 ; 529-532
2012-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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