Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Thermal Driving Method and Displacement Properties of a Thin-Film Polyimide Diaphragm for a MEMS Actuator
Thermal Driving Method and Displacement Properties of a Thin-Film Polyimide Diaphragm for a MEMS Actuator
Thermal Driving Method and Displacement Properties of a Thin-Film Polyimide Diaphragm for a MEMS Actuator
Mifuji, S. (Autor:in) / Adachi, K. (Autor:in) / Tsukioka, T. (Autor:in) / Imai, S. (Autor:in)
KEY ENGINEERING MATERIALS ; 523/524 ; 563-568
01.01.2012
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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