Oxide formation during etching of gallium arsenide

Ghidaoui, D. / Lyon, S. B. / Thompson, G. E. et al. | British Library Online Contents | 2002

High resolution dry etching of III-V semiconductor materials using magnetically enhanced discharges

Pearton, S. J. | British Library Online Contents | 1994

Modeling of altered layer formation during reactive ion etching of GaAs

Mutzke, A. / Rai, A. / Schneider, R. et al. | British Library Online Contents | 2012

Effect of Reactive-Ion Etching on Thermal Oxide Properties on 4H-SiC

Matocha, K. S. / Cowen, C. S. / Beaupre, R. et al. | British Library Online Contents | 2006

Deep reactive ion etching of PMMA

Zhang, C. / Yang, C. / Ding, D. | British Library Online Contents | 2004