Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0001): Fid-Bau Portal

Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0001)

Shi, X. / Pan, G. / Zhou, Y. / Gu, Z. / Gong, H. / Zou, C.

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Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0001)

Shi, X. / Pan, G. / Zhou, Y. / Gu, Z. / Gong, H. / Zou, C.

Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0001)

Shi, X. / Pan, G. / Zhou, Y. / Gu, Z. / Gong, H. / Zou, C.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

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Titel:

Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0001)

Beteiligte:

Shi, X. (Autor:in) / Pan, G. (Autor:in) / Zhou, Y. (Autor:in) / Gu, Z. (Autor:in) / Gong, H. (Autor:in) / Zou, C. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 307 ; 414-427

Erscheinungsdatum:

01.01.2014

Format / Umfang:

14 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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