Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0001): Fid-Bau Portal

Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0001)

Shi, X. / Pan, G. / Zhou, Y. / Gu, Z. / Gong, H. / Zou, C.

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Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0001)

Shi, X. / Pan, G. / Zhou, Y. / Gu, Z. / Gong, H. / Zou, C.

Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0001)

Shi, X. / Pan, G. / Zhou, Y. / Gu, Z. / Gong, H. / Zou, C.

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Check availability in my library

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Document information

Title:

Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0001)

Contributors:

Shi, X. (author) / Pan, G. (author) / Zhou, Y. (author) / Gu, Z. (author) / Gong, H. (author) / Zou, C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 307 ; 414-427

Publication date:

2014-01-01

Size:

14 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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