Low-energy ion implantation for shallow junction crystalline silicon solar cell

Yang, W. L. / Lin, T. Y. / Lien, S. S. et al. | British Library Online Contents | 2016

Plasma immersion ion implantation for shallow junctions in silicon

Pinter, I. / Abdulhadi, A. H. / Makaro, Z. et al. | British Library Online Contents | 1999

A comparative study on ultra-shallow junction formation using co-implantation with fluorine or carbon in pre-amorphized silicon

Graoui, H. / Foad, M. A. | British Library Online Contents | 2005

Characteristics of silicon p-n junction formed by ion implantation with in situ ultrasound treatment

Melnik, V. P. / Olikh, Y. M. / Popov, V. G. et al. | British Library Online Contents | 2005

Silicon isotope superlattices: Ideal SIMS standards for shallow junction characterization

Shimizu, Y. / Takano, A. / Itoh, K. M. | British Library Online Contents | 2008