Ultrasonic flexural vibration assisted chemical mechanical polishing for sapphire substrate

Xu, W. / Lu, X. / Pan, G. et al. | British Library Online Contents | 2010

Chemical mechanical polishing (CMP) anisotropy in sapphire

Zhu, H. / Tessaroto, L. A. / Sabia, R. et al. | British Library Online Contents | 2004

The effect of abrasive hardness on the chemical-assisted polishing of (0001) plane sapphire

Zhu, H. / Niesz, D. E. / Greenhut, V. A. et al. | British Library Online Contents | 2005

Multiscale material removal modeling of chemical mechanical polishing

Seok, J. / Sukam, C. P. / Kim, A. T. et al. | British Library Online Contents | 2003

Chemical-Assisted Mechanical Polishing of Diamond Film on Wafer

Ho-Cheng, H. / Chen, C. C. | British Library Online Contents | 2006