Fabrication of bifacial wafer-scale silicon nanowire arrays with ultra-high aspect ratio through controllable metal-assisted chemical etching

Liu, Y. / Sun, W. / Jiang, Y. et al. | British Library Online Contents | 2015

Fluorinion transfer in silver-assisted chemical etching for silicon nanowires arrays

Feng, T. / Xu, Y. / Zhang, Z. et al. | British Library Online Contents | 2015

Metal Assisted Chemical Etching of Silicon: A Review

Huang, Z. / Geyer, N. / Werner, P. et al. | British Library Online Contents | 2011

Realization of Silicon Nanopillar Arrays with Controllable Sidewall Profiles by Holography Lithography and a Novel Single-Step Deep Reactive Ion Etching

Hung, Y.-J. / Lee, S.-L. / Thibeault, B.J. et al. | British Library Conference Proceedings | 2010

Highly Controllable Nano-Texturing of Silicon Using Hydrogen-Assisted Reactive Ion Etching

Mehran, M. / Sanaee, Z. / Mohajerzadeh, S. et al. | British Library Conference Proceedings | 2010