Ultra-thin silicon oxide layers on crystalline silicon wafers: Comparison of advanced oxidation techniques with respect to chemically abrupt SiO2/Si interfaces with low defect densities

Stegemann, Bert / Gad, Karim M. / Balamou, Patrice et al. | British Library Online Contents | 2017

Ultra thin silicon films directly bonded onto silicon wafers

Fournel, F. / Moriceau, H. / Magnea, N. et al. | British Library Online Contents | 2000

Analysis of surface cracks in multi-crystalline thin silicon wafers

Saffar, S. / Skallerud, B. / Zhang, Z. L. | British Library Online Contents | 2014

Structural characterization of ultra-thin (001) silicon films bonded onto (001) silicon wafers

Rousseau, K. / Rouviere, J. L. / Fournel, F. et al. | British Library Online Contents | 2001

Surface-Texturing of Single-Crystalline Silicon Wafers

Lin, J.Y. / Chang, P.Y. / Hu, C.K. et al. | British Library Online Contents | 2011