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Self Focusing SIMS: Probing thin film composition in very confined volumes
Self Focusing SIMS: Probing thin film composition in very confined volumes
Self Focusing SIMS: Probing thin film composition in very confined volumes
Franquet, Alexis (Autor:in) / Douhard, Bastien (Autor:in) / Melkonyan, Davit (Autor:in) / Favia, Paola (Autor:in) / Conard, Thierry (Autor:in) / Vandervorst, Wilfried (Autor:in)
Applied surface science ; 365 ; 143-152
01.01.2016
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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