Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003

SIMS backside depth profiling of ultra shallow implants

Yeo, K. L. / Wee, A. T. / See, A. et al. | British Library Online Contents | 2003

Accurate depth profiling for ultra-shallow implants using backside-SIMS

Hongo, C. / Tomita, M. / Takenaka, M. | British Library Online Contents | 2004

Site-specific SIMS backside analysis

Gu, C. / Garcia, R. / Pivovarov, A. et al. | British Library Online Contents | 2004

Backside and frontside depth profiling of B delta doping, at low energy, using new and previous magnetic SIMS instruments

Laugier, F. / Hartmann, J. M. / Moriceau, H. et al. | British Library Online Contents | 2004