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Density-functional theory molecular dynamics simulations of a-HfO2/a-SiO2/SiGe and a-HfO2/a-SiO2/Ge with a-SiO2 and a-SiO suboxide interfacial layers
Density-functional theory molecular dynamics simulations of a-HfO2/a-SiO2/SiGe and a-HfO2/a-SiO2/Ge with a-SiO2 and a-SiO suboxide interfacial layers
Density-functional theory molecular dynamics simulations of a-HfO2/a-SiO2/SiGe and a-HfO2/a-SiO2/Ge with a-SiO2 and a-SiO suboxide interfacial layers
Chagarov, Evgueni A. (Autor:in) / Kavrik, Mahmut S. (Autor:in) / Fang, Ziwei (Autor:in) / Tsai, Wilman (Autor:in) / Kummel, Andrew C. (Autor:in)
Applied surface science ; 443 ; 644-654
01.01.2018
11 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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