Density-functional theory molecular dynamics simulations of a-HfO2/a-SiO2/SiGe and a-HfO2/a-SiO2/Ge with a-SiO2 and a-SiO suboxide interfacial layers: Fid-Bau Portal

Density-functional theory molecular dynamics simulations of a-HfO2/a-SiO2/SiGe and a-HfO2/a-SiO2/Ge with a-SiO2 and a-SiO suboxide interfacial layers

Chagarov, Evgueni A. / Kavrik, Mahmut S. / Fang, Ziwei / Tsai, Wilman / Kummel, Andrew C.

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Density-functional theory molecular dynamics simulations of a-HfO2/a-SiO2/SiGe and a-HfO2/a-SiO2/Ge with a-SiO2 and a-SiO suboxide interfacial layers

Chagarov, Evgueni A. / Kavrik, Mahmut S. / Fang, Ziwei / Tsai, Wilman / Kummel, Andrew C.

Density-functional theory molecular dynamics simulations of a-HfO2/a-SiO2/SiGe and a-HfO2/a-SiO2/Ge with a-SiO2 and a-SiO suboxide interfacial layers

Chagarov, Evgueni A. / Kavrik, Mahmut S. / Fang, Ziwei / Tsai, Wilman / Kummel, Andrew C.

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Document information

Title:

Density-functional theory molecular dynamics simulations of a-HfO2/a-SiO2/SiGe and a-HfO2/a-SiO2/Ge with a-SiO2 and a-SiO suboxide interfacial layers

Contributors:

Chagarov, Evgueni A. (author) / Kavrik, Mahmut S. (author) / Fang, Ziwei (author) / Tsai, Wilman (author) / Kummel, Andrew C. (author)

Published in:

Applied surface science ; 443 ; 644-654

Publication date:

2018-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

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