Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of dense quartz crucible high-purity coating
A preparation method of a dense quartz crucible high-purity coating includes the following steps of preparing dense layer slurry from quartz sand, silica sol, deionized water and a ceramic binder, preparing loose layer slurry from quartz sand, silica sol, deionized water and a ceramic binder, preparing protecting layer slurry from quartz sand, deionized water and an oxygen reduction agent, performing surface wetting treatment on a crucible base body or high-purity base body where the high-purity coating needs to be prepared, performing dense layer painting on the area, below a silicon fluid line, in the crucible base body or high-purity base body through the dense layer slurry, performing loose layer painting on the area, below the silicon fluid line, in the crucible base body or high-purity base body through the loose layer slurry, performing drying treatment, and performing protecting layer painting on the area, below the silicon fluid line, in the crucible base body or high-purity base body through the protecting layer slurry. The method can effectively prevent metal impurities from invading, can ensure the firm combination of the coating and the base body, and easily promotes the increase of a wafer conversion rate.
一种致密石英坩埚高纯涂层的制备方法，包括以下方法：利用石英砂、硅溶胶、去离子水、陶瓷粘结剂制备致密层浆料；利用石英砂、硅溶胶、去离子水、陶瓷粘结剂制备疏松层浆料；利用石英砂、去离子水、降氧剂制备保护层浆料；对需要制备高纯涂层的坩埚基体或者高纯基体进行表面润湿处理；对于坩埚基体或者高纯基体中硅液线以下的区域采用致密层浆料进行致密层涂刷；对于坩埚基体或者高纯基体中硅液线以下区域采用疏松层浆料进行疏松层涂刷；烘干处理；对于坩埚基体或者高纯基体中硅液线以下区域采用保护层浆料进行保护层涂刷。该方法可以有效阻隔金属杂质侵入的情况发生，可以确保涂层与基体的牢固结合，并有利于促进晶片转化率的提高。
Preparation method of dense quartz crucible high-purity coating
A preparation method of a dense quartz crucible high-purity coating includes the following steps of preparing dense layer slurry from quartz sand, silica sol, deionized water and a ceramic binder, preparing loose layer slurry from quartz sand, silica sol, deionized water and a ceramic binder, preparing protecting layer slurry from quartz sand, deionized water and an oxygen reduction agent, performing surface wetting treatment on a crucible base body or high-purity base body where the high-purity coating needs to be prepared, performing dense layer painting on the area, below a silicon fluid line, in the crucible base body or high-purity base body through the dense layer slurry, performing loose layer painting on the area, below the silicon fluid line, in the crucible base body or high-purity base body through the loose layer slurry, performing drying treatment, and performing protecting layer painting on the area, below the silicon fluid line, in the crucible base body or high-purity base body through the protecting layer slurry. The method can effectively prevent metal impurities from invading, can ensure the firm combination of the coating and the base body, and easily promotes the increase of a wafer conversion rate.
一种致密石英坩埚高纯涂层的制备方法，包括以下方法：利用石英砂、硅溶胶、去离子水、陶瓷粘结剂制备致密层浆料；利用石英砂、硅溶胶、去离子水、陶瓷粘结剂制备疏松层浆料；利用石英砂、去离子水、降氧剂制备保护层浆料；对需要制备高纯涂层的坩埚基体或者高纯基体进行表面润湿处理；对于坩埚基体或者高纯基体中硅液线以下的区域采用致密层浆料进行致密层涂刷；对于坩埚基体或者高纯基体中硅液线以下区域采用疏松层浆料进行疏松层涂刷；烘干处理；对于坩埚基体或者高纯基体中硅液线以下区域采用保护层浆料进行保护层涂刷。该方法可以有效阻隔金属杂质侵入的情况发生，可以确保涂层与基体的牢固结合，并有利于促进晶片转化率的提高。
Preparation method of dense quartz crucible high-purity coating
一种致密石英坩埚高纯涂层的制备方法
DENG LIANGLIANG (Autor:in) / SU CHENG (Autor:in) / XING FULONG (Autor:in) / WANG HAIGUO (Autor:in) / SUN CHUNHAO (Autor:in) / WANG RONGGUANG (Autor:in) / WANG CHEN (Autor:in)
28.08.2020
Patent
Elektronische Ressource
Chinesisch
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