Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Gallium oxide doped tin oxide ceramic target material and preparation method thereof
The invention provides a gallium oxide doped tin oxide ceramic target material and a preparation method thereof. The gallium oxide doped tin oxide ceramic target material comprises the following raw materials in percentage by mass: 2-10% of gallium oxide and 90-98% of tin oxide high-purity nano powder. The preparation method comprises the following steps: weighing and mixing the powder, adding ammonium polyacrylate, polyvinyl alcohol and pure water, carrying out ball milling on the mixed slurry, granulating, drying to obtain mixed powder, sequentially carrying out compression molding by using an oil press and an isostatic press, and preparing the gallium oxide-doped tin oxide ceramic target material at different sintering temperatures by using a degreasing multi-step sintering integrated sintering technology. According to the doped gallium oxide, the sintering performance of the tin oxide ceramic is effectively improved, the density of the tin oxide ceramic target material is remarkably improved, and meanwhile the gallium oxide doped tin oxide target material which is uniform in structure and fine in grain is obtained through effective control over the preparation process.
本发明提供了一种氧化镓掺杂氧化锡陶瓷靶材及制备方法，其原料按照质量百分比，由氧化锡及氧化镓高纯纳米粉末组成，其组分比例为氧化镓2~10%，氧化锡90~98%。粉末称量混合后加入聚丙烯酸铵，聚乙烯醇及纯水，混合浆料经球磨后造粒干燥，得到混合粉末依次使用油压机、等静压机压制成型，之后使用脱脂‑多步烧结一体化烧结技术在不同烧结温度下制备了氧化镓掺杂氧化锡陶瓷靶材。本发明掺杂的氧化镓有效提高了氧化锡陶瓷的烧结性能，显著提升了氧化锡陶瓷靶材的致密度，同时通过制备工艺的有效控制，获得了组织均匀且晶粒细小的氧化镓掺杂氧化锡靶材。
Gallium oxide doped tin oxide ceramic target material and preparation method thereof
The invention provides a gallium oxide doped tin oxide ceramic target material and a preparation method thereof. The gallium oxide doped tin oxide ceramic target material comprises the following raw materials in percentage by mass: 2-10% of gallium oxide and 90-98% of tin oxide high-purity nano powder. The preparation method comprises the following steps: weighing and mixing the powder, adding ammonium polyacrylate, polyvinyl alcohol and pure water, carrying out ball milling on the mixed slurry, granulating, drying to obtain mixed powder, sequentially carrying out compression molding by using an oil press and an isostatic press, and preparing the gallium oxide-doped tin oxide ceramic target material at different sintering temperatures by using a degreasing multi-step sintering integrated sintering technology. According to the doped gallium oxide, the sintering performance of the tin oxide ceramic is effectively improved, the density of the tin oxide ceramic target material is remarkably improved, and meanwhile the gallium oxide doped tin oxide target material which is uniform in structure and fine in grain is obtained through effective control over the preparation process.
本发明提供了一种氧化镓掺杂氧化锡陶瓷靶材及制备方法，其原料按照质量百分比，由氧化锡及氧化镓高纯纳米粉末组成，其组分比例为氧化镓2~10%，氧化锡90~98%。粉末称量混合后加入聚丙烯酸铵，聚乙烯醇及纯水，混合浆料经球磨后造粒干燥，得到混合粉末依次使用油压机、等静压机压制成型，之后使用脱脂‑多步烧结一体化烧结技术在不同烧结温度下制备了氧化镓掺杂氧化锡陶瓷靶材。本发明掺杂的氧化镓有效提高了氧化锡陶瓷的烧结性能，显著提升了氧化锡陶瓷靶材的致密度，同时通过制备工艺的有效控制，获得了组织均匀且晶粒细小的氧化镓掺杂氧化锡靶材。
Gallium oxide doped tin oxide ceramic target material and preparation method thereof
一种氧化镓掺杂氧化锡陶瓷靶材及制备方法
CHEN JIE (Autor:in) / QI CHAO (Autor:in) / SUN BENSHUANG (Autor:in) / HUAI ZHIYUAN (Autor:in) / HE JILIN (Autor:in)
30.04.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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