Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-performance doped tin oxide ceramic target material and preparation method thereof
The invention relates to the technical field of tin oxide ceramic targets, and particularly discloses a high-performance doped tin oxide ceramic target and a preparation method thereof. A preparation method of a high-performance doped tin oxide ceramic target material comprises the following steps: 1) uniformly mixing water, a powder dispersant and a grinding lubricant, then adding raw material powder of tantalum oxide, antimony oxide, zinc oxide, manganese oxide, cobalt oxide and tin oxide, and mixing and homogenizing to prepare slurry; 2) grinding the slurry, and then adding a powder forming adhesive into the slurry; the invention discloses a high-performance doped tin oxide ceramic target material and a preparation method thereof.The high-performance doped tin oxide ceramic target material is prepared by the steps of (1) grinding a slurry, (2) grinding the slurry, (3) drying and granulating the ground slurry to obtain doped tin oxide particles, (4) preparing the doped tin oxide particles into a doped tin oxide target material blank, and (5) sintering the doped tin oxide target material blank to obtain the high-performance doped tin oxide ceramic target material.
本申请涉及氧化锡陶瓷靶材技术领域，具体公开了一种高性能掺杂氧化锡陶瓷靶材及其制备方法。一种高性能掺杂氧化锡陶瓷靶材的制备方法，包括如下步骤：1）将水、粉体分散剂、研磨润滑剂混合均匀，然后加入氧化钽、氧化锑、氧化锌、氧化锰、氧化钴、氧化锡的原料粉，混合均质制得浆料；2）对浆料进行研磨处理，然后向浆料中加入粉体成型粘接剂；3）将研磨处理后的浆料进行干燥制粒，得到掺杂氧化锡颗粒；4）将掺杂氧化锡颗粒制备成掺杂氧化锡靶材坯体；5）对掺杂氧化锡靶材坯体进行烧结，即得。本申请制得的高性能掺杂氧化锡陶瓷靶材的物理性能、电学性能优异。
High-performance doped tin oxide ceramic target material and preparation method thereof
The invention relates to the technical field of tin oxide ceramic targets, and particularly discloses a high-performance doped tin oxide ceramic target and a preparation method thereof. A preparation method of a high-performance doped tin oxide ceramic target material comprises the following steps: 1) uniformly mixing water, a powder dispersant and a grinding lubricant, then adding raw material powder of tantalum oxide, antimony oxide, zinc oxide, manganese oxide, cobalt oxide and tin oxide, and mixing and homogenizing to prepare slurry; 2) grinding the slurry, and then adding a powder forming adhesive into the slurry; the invention discloses a high-performance doped tin oxide ceramic target material and a preparation method thereof.The high-performance doped tin oxide ceramic target material is prepared by the steps of (1) grinding a slurry, (2) grinding the slurry, (3) drying and granulating the ground slurry to obtain doped tin oxide particles, (4) preparing the doped tin oxide particles into a doped tin oxide target material blank, and (5) sintering the doped tin oxide target material blank to obtain the high-performance doped tin oxide ceramic target material.
本申请涉及氧化锡陶瓷靶材技术领域，具体公开了一种高性能掺杂氧化锡陶瓷靶材及其制备方法。一种高性能掺杂氧化锡陶瓷靶材的制备方法，包括如下步骤：1）将水、粉体分散剂、研磨润滑剂混合均匀，然后加入氧化钽、氧化锑、氧化锌、氧化锰、氧化钴、氧化锡的原料粉，混合均质制得浆料；2）对浆料进行研磨处理，然后向浆料中加入粉体成型粘接剂；3）将研磨处理后的浆料进行干燥制粒，得到掺杂氧化锡颗粒；4）将掺杂氧化锡颗粒制备成掺杂氧化锡靶材坯体；5）对掺杂氧化锡靶材坯体进行烧结，即得。本申请制得的高性能掺杂氧化锡陶瓷靶材的物理性能、电学性能优异。
High-performance doped tin oxide ceramic target material and preparation method thereof
一种高性能掺杂氧化锡陶瓷靶材及其制备方法
YAO YUAN (Autor:in) / MENG HONGBO (Autor:in) / WANG YIBO (Autor:in) / JIANG YICHANG (Autor:in)
13.09.2024
Patent
Elektronische Ressource
Chinesisch
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