Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-density high-mobility indium oxide doped target material and preparation method thereof
The invention relates to the technical field of target materials, and particularly discloses a high-density high-mobility indium oxide doped target material and a preparation method thereof. The high-density and high-mobility indium oxide doped target material is prepared from the following raw materials in parts by weight: 90 to 98 parts of indium oxide, 5 to 8 parts of tin oxide, 1 to 3 parts of rare earth oxide, 0.5 to 1.5 parts of binding agent, 0.5 to 0.8 part of dispersing agent and 0.3 to 0.5 part of stabilizing agent, and the binding agent is carboxymethyl cellulose and polyvinyl alcohol. The high-density and high-mobility indium oxide doped target material disclosed by the invention has relatively high density and mobility under the synergistic effect of all the components.
本申请涉及靶材技术领域，具体公开了一种高密度高迁移率氧化铟掺杂靶材及其制备方法。一种高密度高迁移率氧化铟掺杂靶材，包括以下重量份的原料：氧化铟90‑98份，氧化锡5‑8份，稀土氧化物1‑3份，粘结剂0.5‑1.5份，分散剂0.5‑0.8份，稳定剂0.3‑0.5份，所述粘结剂为羧甲基纤维素和聚乙烯醇。本申请的一种高密度高迁移率氧化铟掺杂靶材，在各个组分的协同作用下，具有较高的致密度和迁移率。
High-density high-mobility indium oxide doped target material and preparation method thereof
The invention relates to the technical field of target materials, and particularly discloses a high-density high-mobility indium oxide doped target material and a preparation method thereof. The high-density and high-mobility indium oxide doped target material is prepared from the following raw materials in parts by weight: 90 to 98 parts of indium oxide, 5 to 8 parts of tin oxide, 1 to 3 parts of rare earth oxide, 0.5 to 1.5 parts of binding agent, 0.5 to 0.8 part of dispersing agent and 0.3 to 0.5 part of stabilizing agent, and the binding agent is carboxymethyl cellulose and polyvinyl alcohol. The high-density and high-mobility indium oxide doped target material disclosed by the invention has relatively high density and mobility under the synergistic effect of all the components.
本申请涉及靶材技术领域，具体公开了一种高密度高迁移率氧化铟掺杂靶材及其制备方法。一种高密度高迁移率氧化铟掺杂靶材，包括以下重量份的原料：氧化铟90‑98份，氧化锡5‑8份，稀土氧化物1‑3份，粘结剂0.5‑1.5份，分散剂0.5‑0.8份，稳定剂0.3‑0.5份，所述粘结剂为羧甲基纤维素和聚乙烯醇。本申请的一种高密度高迁移率氧化铟掺杂靶材，在各个组分的协同作用下，具有较高的致密度和迁移率。
High-density high-mobility indium oxide doped target material and preparation method thereof
一种高密度高迁移率氧化铟掺杂靶材及其制备方法
DING JINDUO (Autor:in) / GE CHUNQIAO (Autor:in) / CHEN LU (Autor:in) / LIANG QIYING (Autor:in)
14.05.2024
Patent
Elektronische Ressource
Chinesisch
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