Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-density high-uniformity zinc aluminum oxide target material and preparation method thereof
The invention belongs to the technical field of target materials, and discloses a high-density and high-uniformity zinc aluminum oxide target material and a preparation method thereof.The high-density and high-uniformity zinc aluminum oxide target material is obtained by mixing small-particle-size zinc aluminum oxide powder and large-particle-size zinc aluminum oxide powder to obtain mixed powder and then sequentially conducting mold pressing, cold isostatic pressing, degreasing heat treatment and sintering; wherein the small-particle-size aluminum zinc oxide powder accounts for 30-50% of the mass of the mixed powder, the particle size of the small-particle-size aluminum zinc oxide powder is 0.3-0.8 mu m, the particle size of the large-particle-size aluminum zinc oxide powder is 1-1.5 mu m, and the difference between the particle size of the large-particle-size aluminum zinc oxide powder and the particle size of the small-particle-size aluminum zinc oxide powder is smaller than 0.8 mu m. The zinc aluminum oxide powder is prepared by mixing the small-particle-size zinc aluminum oxide powder and the large-particle-size zinc aluminum oxide powder with the specific particle size, the target sintering density can be effectively improved, meanwhile, the metallographic structure uniformity and bending strength of the target can be improved, and the comprehensive performance of the target is improved in a balanced mode.
本发明属于靶材技术领域，公开了一种高密度高均匀性氧化锌铝靶材及其制备方法，该高密度高均匀性氧化锌铝靶材，由小粒径氧化锌铝粉末和大粒径氧化锌铝粉末混合得到混合粉体后依次经过模压、冷等静压、脱脂热处理、烧结得到；其中小粒径氧化锌铝粉末占混合粉体质量的30％‑50％，小粒径氧化锌铝粉末的粒径为0.3～0.8μm，大粒径氧化锌铝粉末的粒径为1‑1.5μm，且大粒径氧化锌铝粉末与小粒径氧化锌铝粉末的粒径之差＜0.8μm。本发明采用特定粒径的小粒径氧化锌铝粉末与大粒径氧化锌铝粉末混合来制备氧化锌铝粉末，能够有效提高靶材烧结密度的同时还能够改善靶材的金相组织均匀性和抗弯强度，平衡提高靶材的综合性能。
High-density high-uniformity zinc aluminum oxide target material and preparation method thereof
The invention belongs to the technical field of target materials, and discloses a high-density and high-uniformity zinc aluminum oxide target material and a preparation method thereof.The high-density and high-uniformity zinc aluminum oxide target material is obtained by mixing small-particle-size zinc aluminum oxide powder and large-particle-size zinc aluminum oxide powder to obtain mixed powder and then sequentially conducting mold pressing, cold isostatic pressing, degreasing heat treatment and sintering; wherein the small-particle-size aluminum zinc oxide powder accounts for 30-50% of the mass of the mixed powder, the particle size of the small-particle-size aluminum zinc oxide powder is 0.3-0.8 mu m, the particle size of the large-particle-size aluminum zinc oxide powder is 1-1.5 mu m, and the difference between the particle size of the large-particle-size aluminum zinc oxide powder and the particle size of the small-particle-size aluminum zinc oxide powder is smaller than 0.8 mu m. The zinc aluminum oxide powder is prepared by mixing the small-particle-size zinc aluminum oxide powder and the large-particle-size zinc aluminum oxide powder with the specific particle size, the target sintering density can be effectively improved, meanwhile, the metallographic structure uniformity and bending strength of the target can be improved, and the comprehensive performance of the target is improved in a balanced mode.
本发明属于靶材技术领域，公开了一种高密度高均匀性氧化锌铝靶材及其制备方法，该高密度高均匀性氧化锌铝靶材，由小粒径氧化锌铝粉末和大粒径氧化锌铝粉末混合得到混合粉体后依次经过模压、冷等静压、脱脂热处理、烧结得到；其中小粒径氧化锌铝粉末占混合粉体质量的30％‑50％，小粒径氧化锌铝粉末的粒径为0.3～0.8μm，大粒径氧化锌铝粉末的粒径为1‑1.5μm，且大粒径氧化锌铝粉末与小粒径氧化锌铝粉末的粒径之差＜0.8μm。本发明采用特定粒径的小粒径氧化锌铝粉末与大粒径氧化锌铝粉末混合来制备氧化锌铝粉末，能够有效提高靶材烧结密度的同时还能够改善靶材的金相组织均匀性和抗弯强度，平衡提高靶材的综合性能。
High-density high-uniformity zinc aluminum oxide target material and preparation method thereof
一种高密度高均匀性氧化锌铝靶材及其制备方法
LUO SISHI (Autor:in) / LI KAIJIE (Autor:in) / SHAO XUELIANG (Autor:in) / GU DESHENG (Autor:in) / ZHANG XINGYU (Autor:in)
12.12.2023
Patent
Elektronische Ressource
Chinesisch
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