Alumina ceramic substrate and manufacturing method thereof: Fid-Bau Portal

Alumina ceramic substrate and manufacturing method thereof

ZHENG SHUANGXI / CHEN JIANGTAO / HU HAITAO

The embodiment of the invention provides an aluminum oxide ceramic substrate and a manufacturing method thereof, and the manufacturing method of the aluminum oxide ceramic substrate comprises the steps: selecting a pressing plate matched with the aluminum oxide ceramic substrate, and fixedly connecting the aluminum oxide ceramic substrate with the pressing plate; placing the aluminum oxide ceramic substrate and the pressing plate in a reaction chamber; and according to the parameter information of the aluminum oxide ceramic substrate, determining a set heating rate in the reaction chamber, and sintering the aluminum oxide ceramic substrate. By adopting the technical scheme, the warping of the aluminum oxide ceramic substrate can be reduced, the qualification rate is improved, and the working performance of a device applying the aluminum oxide ceramic substrate is further improved.

本说明书实施例提供一种氧化铝陶瓷基片及其制造方法，其中，氧化铝陶瓷基片的制造方法，包括：选取与所述氧化铝陶瓷基片相适配的压板，并固定连接所述氧化铝陶瓷基片和所述压板；将所述氧化铝陶瓷基片和所述压板放置于反应腔室；根据所述氧化铝陶瓷基片的参数信息，确定所述反应腔室内的设定升温速率，对所述氧化铝陶瓷基片进行烧结处理。采用上述技术方案，能够降低氧化铝陶瓷基片的翘曲，提高合格率，进而提高应用氧化铝陶瓷基片的器件的工作性能。

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