Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Zinc tin oxide ceramic target material and preparation method thereof
The invention belongs to the technical field of semiconductor targets, and discloses a preparation method of a tin zinc oxide ceramic target, which comprises the following steps: mixing tin dioxide powder and zinc oxide powder, adding pure water, a dispersant and a binder, mixing, stirring, and grinding to obtain mixed slurry; carrying out spray drying and homogenization on the mixed slurry to obtain tin zinc oxide powder; then the tin zinc oxide powder is subjected to mold pressing and cold isostatic pressing forming, and a tin zinc oxide target blank is obtained; performing high-temperature sintering on the tin-zinc oxide target blank to obtain a tin-zinc oxide target material; and finally, loading the tin zinc oxide target material into a mold, sealing, degassing, carrying out hot isostatic pressing treatment, and removing the mold to obtain the tin zinc oxide ceramic target material. In addition, the invention further discloses the tin zinc oxide ceramic target material which is prepared through the preparation method.
本发明属于半导体靶材技术领域，公开了一种氧化锡锌陶瓷靶材的制备方法，包含如下步骤：先将二氧化锡粉末、氧化锌粉末混合后，加入纯水、分散剂、粘结剂再混合、搅拌，研磨，得到混合浆料；再将混合浆料经喷雾干燥、均质后，得到氧化锡锌粉末；然后将氧化锡锌粉末进行模压、冷等静压成型，得到氧化锡锌靶坯；将氧化锡锌靶坯进行高温烧结后，得到氧化锡锌靶材；最后将氧化锡锌靶材装入模具，封口、脱气、热等静压处理，去除模具后得到氧化锡锌陶瓷靶材；此外，本申请还公开了一种氧化锡锌陶瓷靶材，通过上述制备方法制得。
Zinc tin oxide ceramic target material and preparation method thereof
The invention belongs to the technical field of semiconductor targets, and discloses a preparation method of a tin zinc oxide ceramic target, which comprises the following steps: mixing tin dioxide powder and zinc oxide powder, adding pure water, a dispersant and a binder, mixing, stirring, and grinding to obtain mixed slurry; carrying out spray drying and homogenization on the mixed slurry to obtain tin zinc oxide powder; then the tin zinc oxide powder is subjected to mold pressing and cold isostatic pressing forming, and a tin zinc oxide target blank is obtained; performing high-temperature sintering on the tin-zinc oxide target blank to obtain a tin-zinc oxide target material; and finally, loading the tin zinc oxide target material into a mold, sealing, degassing, carrying out hot isostatic pressing treatment, and removing the mold to obtain the tin zinc oxide ceramic target material. In addition, the invention further discloses the tin zinc oxide ceramic target material which is prepared through the preparation method.
本发明属于半导体靶材技术领域，公开了一种氧化锡锌陶瓷靶材的制备方法，包含如下步骤：先将二氧化锡粉末、氧化锌粉末混合后，加入纯水、分散剂、粘结剂再混合、搅拌，研磨，得到混合浆料；再将混合浆料经喷雾干燥、均质后，得到氧化锡锌粉末；然后将氧化锡锌粉末进行模压、冷等静压成型，得到氧化锡锌靶坯；将氧化锡锌靶坯进行高温烧结后，得到氧化锡锌靶材；最后将氧化锡锌靶材装入模具，封口、脱气、热等静压处理，去除模具后得到氧化锡锌陶瓷靶材；此外，本申请还公开了一种氧化锡锌陶瓷靶材，通过上述制备方法制得。
Zinc tin oxide ceramic target material and preparation method thereof
一种氧化锡锌陶瓷靶材及其制备方法
GU DESHENG (Autor:in) / ZHANG XINGYU (Autor:in) / LUO SISHI (Autor:in) / LI KAIJIE (Autor:in) / WANG QIFENG (Autor:in)
12.11.2024
Patent
Elektronische Ressource
Chinesisch
Zinc oxide target material and preparation method thereof
| Europäisches Patentamt | 2023
Zinc oxide target material and preparation method thereof
| Europäisches Patentamt | 2024
Zinc tin oxide target material and preparation method thereof
| Europäisches Patentamt | 2024
Aluminum zinc oxide target material and preparation method thereof
| Europäisches Patentamt | 2024
Aluminum zinc oxide target material and preparation method thereof
| Europäisches Patentamt | 2024