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Prestress-enhanced Si3N4 ceramic substrate and preparation method thereof
The invention discloses a preparation method of a prestress-enhanced Si3N4 ceramic substrate. The preparation method comprises the following specific steps: dividing a Si3N4 raw material into two parts, and grinding the Si3N4 raw material into two different particle sizes; the preparation method comprises the following steps: mixing a metal oxidation sintering aid with Si3N4 to prepare a Si3N4 ceramic substrate; punching a fine hole array on the Si3N4 ceramic substrate; a metal net is laid on the upper surface of the porous Si3N4 ceramic substrate; the preparation method comprises the following steps: mixing a metal oxidation sintering aid with another Si3N4, laying Si3N4 ceramic substrates at the bottom in a mold box, and sequentially superposing and sintering a plurality of Si3N4 ceramic substrates on which metal nets are laid to prepare the reinforced Si3N4 ceramic substrate, thereby preparing the prestress reinforced Si3N4 ceramic substrate by adopting the preparation method. According to the method, the overall strength of the Si3N4 ceramic substrate is further improved, and cracks and cracks are greatly reduced due to the fact that the substrate is formed through stacking. The pre-stress is increased by the metal net, and the mixture B is added to form a coating and reinforcing design, so that the strength of the Si3N4 ceramic substrate is improved by more than one time, the detected bending strength can reach up to 700-800MPa, and the mass production can be realized.
本发明公开了一种预应力增强的Si3N4陶瓷基板的制备方法，具体步骤如下：将Si3N4原料分成两研磨两种不同粒径；将金属氧化烧结助剂与一种Si3N4混合，制成Si3N4陶瓷基片；Si3N4陶瓷基片上冲压细孔阵列；带孔Si3N4陶瓷基片上表面铺设金属网；将金属氧化烧结助剂与另一种Si3N4混合，在一个模具盒内底部铺设在Si3N4陶瓷基片，依次完成多块铺设金属网的Si3N4陶瓷基片的叠加，烧结制成增强的Si3N4陶瓷基板，采用上述备方法制成预应力增强的Si3N4陶瓷基板。本发明使得Si3N4陶瓷基片整体强度进一步变大，由于成叠形成基板，极大降低裂纹以及裂痕的出现。设置的金属网增加了预应力，再加混合料B形成包覆，增强设计，使得Si3N4陶瓷基片强度提高一倍以上，检测弯曲强度可高达700‑800MPa，可实现量产化。
Prestress-enhanced Si3N4 ceramic substrate and preparation method thereof
The invention discloses a preparation method of a prestress-enhanced Si3N4 ceramic substrate. The preparation method comprises the following specific steps: dividing a Si3N4 raw material into two parts, and grinding the Si3N4 raw material into two different particle sizes; the preparation method comprises the following steps: mixing a metal oxidation sintering aid with Si3N4 to prepare a Si3N4 ceramic substrate; punching a fine hole array on the Si3N4 ceramic substrate; a metal net is laid on the upper surface of the porous Si3N4 ceramic substrate; the preparation method comprises the following steps: mixing a metal oxidation sintering aid with another Si3N4, laying Si3N4 ceramic substrates at the bottom in a mold box, and sequentially superposing and sintering a plurality of Si3N4 ceramic substrates on which metal nets are laid to prepare the reinforced Si3N4 ceramic substrate, thereby preparing the prestress reinforced Si3N4 ceramic substrate by adopting the preparation method. According to the method, the overall strength of the Si3N4 ceramic substrate is further improved, and cracks and cracks are greatly reduced due to the fact that the substrate is formed through stacking. The pre-stress is increased by the metal net, and the mixture B is added to form a coating and reinforcing design, so that the strength of the Si3N4 ceramic substrate is improved by more than one time, the detected bending strength can reach up to 700-800MPa, and the mass production can be realized.
本发明公开了一种预应力增强的Si3N4陶瓷基板的制备方法，具体步骤如下：将Si3N4原料分成两研磨两种不同粒径；将金属氧化烧结助剂与一种Si3N4混合，制成Si3N4陶瓷基片；Si3N4陶瓷基片上冲压细孔阵列；带孔Si3N4陶瓷基片上表面铺设金属网；将金属氧化烧结助剂与另一种Si3N4混合，在一个模具盒内底部铺设在Si3N4陶瓷基片，依次完成多块铺设金属网的Si3N4陶瓷基片的叠加，烧结制成增强的Si3N4陶瓷基板，采用上述备方法制成预应力增强的Si3N4陶瓷基板。本发明使得Si3N4陶瓷基片整体强度进一步变大，由于成叠形成基板，极大降低裂纹以及裂痕的出现。设置的金属网增加了预应力，再加混合料B形成包覆，增强设计，使得Si3N4陶瓷基片强度提高一倍以上，检测弯曲强度可高达700‑800MPa，可实现量产化。
Prestress-enhanced Si3N4 ceramic substrate and preparation method thereof
一种预应力增强的Si3N4陶瓷基板及其制备方法
TIAN XIN (Autor:in) / XU TAO (Autor:in) / ZHANG YING (Autor:in) / WANG TINGTING (Autor:in) / ZHAO GUANGQIANG (Autor:in)
04.06.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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