Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-density nickel oxide-based rotating target material and preparation method thereof
The invention discloses a high-density nickel oxide-based rotating target material and a preparation method thereof.The rotating target material comprises nickel oxide and doped oxides, the mass fraction of the nickel oxide is not smaller than 95.0 wt%, the total mass fraction of the doped oxides is not higher than 7.5 wt%, the doped oxides are selected from at least two of zinc oxide, strontium oxide and tin oxide, and the total mass fraction of the doped oxides is not smaller than 7.5 wt%. The mass fraction ranges of the selected corresponding oxides are as follows: 0.1 to 1.0 weight percent of zinc oxide, 0.1 to 1.5 weight percent of strontium oxide and 0.1 to 5.0 weight percent of tin oxide. When the nickel oxide rotating target material is prepared, nickel oxide powder and doped oxide powder are used as raw materials, and the rotating target material is obtained through the steps of granulation, cold isostatic pressing, low-temperature normal-pressure segmented sintering and furnace cooling. According to the method, low-temperature normal-pressure segmented sintering is adopted, and the high-density rotating target with the relative density reaching 99.29% or above is prepared. The nickel oxide rotating target material is good in compactness and low in cost, and can be applied to mass production of perovskite solar cells.
本发明公开了一种高密度氧化镍基旋转靶材及其制备方法，该旋转靶材包括氧化镍和掺杂氧化物，所述氧化镍的质量分数不小于95.0wt%，掺杂氧化物的总质量分数不高于7.5wt%，所述掺杂氧化物选自氧化锌、氧化锶、氧化锡中的至少两种，且选择对应氧化物的质量分数范围为：氧化锌0.1~1.0wt%、氧化锶0.1~1.5wt%、氧化锡0.1~5.0wt%。本发明的氧化镍旋转靶材制备时，以氧化镍粉体、掺杂氧化物粉体作为原料，经过造粒、冷等静压、低温常压分段烧结、随炉冷却步骤，即得到旋转靶材。本发明采用低温常压分段烧结，制得相对密度达到99.29%以上的高密度旋转靶材。本发明的氧化镍旋转靶材致密性好、成本低，可应用于钙钛矿太阳能电池片量产中。
High-density nickel oxide-based rotating target material and preparation method thereof
The invention discloses a high-density nickel oxide-based rotating target material and a preparation method thereof.The rotating target material comprises nickel oxide and doped oxides, the mass fraction of the nickel oxide is not smaller than 95.0 wt%, the total mass fraction of the doped oxides is not higher than 7.5 wt%, the doped oxides are selected from at least two of zinc oxide, strontium oxide and tin oxide, and the total mass fraction of the doped oxides is not smaller than 7.5 wt%. The mass fraction ranges of the selected corresponding oxides are as follows: 0.1 to 1.0 weight percent of zinc oxide, 0.1 to 1.5 weight percent of strontium oxide and 0.1 to 5.0 weight percent of tin oxide. When the nickel oxide rotating target material is prepared, nickel oxide powder and doped oxide powder are used as raw materials, and the rotating target material is obtained through the steps of granulation, cold isostatic pressing, low-temperature normal-pressure segmented sintering and furnace cooling. According to the method, low-temperature normal-pressure segmented sintering is adopted, and the high-density rotating target with the relative density reaching 99.29% or above is prepared. The nickel oxide rotating target material is good in compactness and low in cost, and can be applied to mass production of perovskite solar cells.
本发明公开了一种高密度氧化镍基旋转靶材及其制备方法，该旋转靶材包括氧化镍和掺杂氧化物，所述氧化镍的质量分数不小于95.0wt%，掺杂氧化物的总质量分数不高于7.5wt%，所述掺杂氧化物选自氧化锌、氧化锶、氧化锡中的至少两种，且选择对应氧化物的质量分数范围为：氧化锌0.1~1.0wt%、氧化锶0.1~1.5wt%、氧化锡0.1~5.0wt%。本发明的氧化镍旋转靶材制备时，以氧化镍粉体、掺杂氧化物粉体作为原料，经过造粒、冷等静压、低温常压分段烧结、随炉冷却步骤，即得到旋转靶材。本发明采用低温常压分段烧结，制得相对密度达到99.29%以上的高密度旋转靶材。本发明的氧化镍旋转靶材致密性好、成本低，可应用于钙钛矿太阳能电池片量产中。
High-density nickel oxide-based rotating target material and preparation method thereof
一种高密度氧化镍基旋转靶材及其制备方法
MA CHAONING (Autor:in) / NIU XIAODI (Autor:in) / HUANG SHICHENG (Autor:in) / HOU YUANXIN (Autor:in) / MENG HONGBO (Autor:in) / WANG SHUNA (Autor:in)
18.06.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
High-density nickel magnesium oxide target material and preparation method thereof
| Europäisches Patentamt | 2024
Oxide rotating target material and preparation method thereof
| Europäisches Patentamt | 2021
High-density oxide target material and preparation method thereof
| Europäisches Patentamt | 2024
High-density tin oxide-based ceramic target material and preparation method thereof
| Europäisches Patentamt | 2024
Composite nickel magnesium oxide target material and preparation method thereof
| Europäisches Patentamt | 2023