Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-density tin oxide-based ceramic target material and preparation method thereof
The invention discloses a high-density tin oxide-based ceramic target material and a preparation method thereof.The prepared high-density tin oxide-based ceramic target material is composed of antimony trioxide obtained by converting colloidal antimony pentoxide dry powder after oxygen atoms are lost, tin oxide and trace doping elements, and the weight ratio of tin oxide to antimony trioxide to a doping agent is 100: (1-5): (0.5-2); the relative density of the high-density tin oxide-based ceramic target material is greater than 99.5%, and the resistivity of the target material is less than 10 * 10 <-3 > omega.cm. Compared with an indium oxide-based target material, the high-density tin oxide-based ceramic target material has the advantages of abundant resources, low price, no toxicity and no pollution.
本发明公开了一种高密度氧化锡基陶瓷靶材及其制备方法，制备得到的高密度氧化锡基陶瓷靶材由胶体五氧化二锑干粉失去氧原子后转变得到的三氧化二锑、氧化锡和微量掺杂元素组成，氧化锡、三氧化二锑和掺杂剂的重量比为100：1‑5：0.5‑2，高密度氧化锡基陶瓷靶材的相对密度大于99.5％、靶材电阻率＜10×10‑3Ω·cm，本发明相对于氧化铟基靶材，其资源丰富、价格低廉、无毒无污染。
High-density tin oxide-based ceramic target material and preparation method thereof
The invention discloses a high-density tin oxide-based ceramic target material and a preparation method thereof.The prepared high-density tin oxide-based ceramic target material is composed of antimony trioxide obtained by converting colloidal antimony pentoxide dry powder after oxygen atoms are lost, tin oxide and trace doping elements, and the weight ratio of tin oxide to antimony trioxide to a doping agent is 100: (1-5): (0.5-2); the relative density of the high-density tin oxide-based ceramic target material is greater than 99.5%, and the resistivity of the target material is less than 10 * 10 <-3 > omega.cm. Compared with an indium oxide-based target material, the high-density tin oxide-based ceramic target material has the advantages of abundant resources, low price, no toxicity and no pollution.
本发明公开了一种高密度氧化锡基陶瓷靶材及其制备方法，制备得到的高密度氧化锡基陶瓷靶材由胶体五氧化二锑干粉失去氧原子后转变得到的三氧化二锑、氧化锡和微量掺杂元素组成，氧化锡、三氧化二锑和掺杂剂的重量比为100：1‑5：0.5‑2，高密度氧化锡基陶瓷靶材的相对密度大于99.5％、靶材电阻率＜10×10‑3Ω·cm，本发明相对于氧化铟基靶材，其资源丰富、价格低廉、无毒无污染。
High-density tin oxide-based ceramic target material and preparation method thereof
一种高密度氧化锡基陶瓷靶材及其制备方法
WEN HONGFU (Autor:in) / LI PENG (Autor:in) / CAI ZHENGMING (Autor:in)
20.08.2024
Patent
Elektronische Ressource
Chinesisch
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