Electrostatic chuck ceramic plate sintering method: Fid-Bau Portal

Electrostatic chuck ceramic plate sintering method

LI JUN / CHEN ZHENNING / SHI ZHEYUAN / XIAO WEI

The invention discloses an electrostatic chuck ceramic plate sintering method, and belongs to the technical field of electrostatic chucks, and the sintering method comprises the following steps: 1, manufacturing an electrostatic chuck ceramic plate blank for later use, and preparing a setter plate device for later use; 2, particulate matter is laid on a setter plate of the setter plate device, and the electrostatic chuck ceramic plate blank is placed on the particulate matter; thirdly, the electrostatic chuck ceramic plate blank and the setter plate device are placed in a sintering furnace together to be sintered; and 4, after sintering of the electrostatic chuck ceramic plate blank is completed, the electrostatic chuck ceramic plate blank is taken out of the load bearing plate device, particulate matter bonded to the electrostatic chuck ceramic plate is polished thoroughly through polishing equipment, the surface of the electrostatic chuck ceramic plate is polished to be flat, and sintering of the electrostatic chuck ceramic plate is completed. A particulate matter limiting device is arranged on the burning bearing plate, and a particulate matter flattening assembly is arranged above the particulate matter limiting device and rotationally connected with the burning bearing plate.

本发明公开了一种静电卡盘陶瓷板烧结方法，属于静电卡盘技术领域，所述烧结方法包括以下步骤：步骤一：制造静电卡盘陶瓷板胚体备用，准备承烧板装置备用；步骤二：在所述承烧板装置的承烧板上铺上颗粒物，将所述静电卡盘陶瓷板胚体放置颗粒物上；步骤三：将所述静电卡盘陶瓷板胚体和所述承烧板装置一起放置到烧结炉中进行烧结；步骤四：所述静电卡盘陶瓷板胚体烧结完成后从所述承烧板装置取出，通过打磨设备将粘结在静电卡盘陶瓷板上的颗粒物打磨干净，将所述静电卡盘陶瓷板的表面打磨平整即完成了静电卡盘陶瓷板的烧结。承烧板上设有颗粒物限位装置，颗粒物限位装置的上方设有颗粒物铺平组件，颗粒物铺平组件与承烧板转动连接。

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