Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Method for improving sintering flatness of electrostatic chuck ceramic plate
The invention discloses a method for improving sintering flatness of a ceramic plate of an electrostatic chuck, and belongs to the technical field of sintering of the ceramic plate of the electrostatic chuck. Obtaining the ignition loss proportion of the powder; calculating the mass of the filler in each region, wherein the mass of the filler in each region is the ratio of the mass of the ceramic in each region to the ignition loss of the powder; according to the filling powder mass, the powder apparent density and the area of the region, the filling height H of the region is calculated according to the following formula: H = (M/rho)/S, H is the filling height, M is the filling powder mass of the region, rho is the powder apparent density, and S is the area of the region; according to the calculation result of the above steps, a partition filling jig is designed; adding powder with corresponding mass into the respective corresponding areas by using the partitioned filling jig; adding a graphite base plate, and performing hot pressed sintering on the electrostatic chuck ceramic plate; and sintering the discharged ceramic block, and detecting the flatness.
本发明公开了一种提高静电卡盘陶瓷板烧结平整度的方法，属于静电卡盘陶瓷板烧结技术领域，所述方法包括：计算出各区域的陶瓷质量；得出粉料的烧失量比例；计算各区域填料的质量，各个区域填粉的质量为各区域陶瓷质量与粉料烧失量的比；根据填粉质量、粉料松装密度，以及区域面积大小，计算出该区域填料高度H，填料高度H通过下述公式计算：H＝(M/ρ)/S其中，H为填料高度，M为该区域的填粉质量，ρ为粉料松装密度，S为区域面积；根据上述步骤的计算结果，设计分区填料治具；使用所述分区填料治具，在各自对应的区域中加入相应质量的粉体；加石墨垫板，对静电卡盘陶瓷板进行热压烧结；烧结出炉的陶瓷块，检测平整度。
Method for improving sintering flatness of electrostatic chuck ceramic plate
The invention discloses a method for improving sintering flatness of a ceramic plate of an electrostatic chuck, and belongs to the technical field of sintering of the ceramic plate of the electrostatic chuck. Obtaining the ignition loss proportion of the powder; calculating the mass of the filler in each region, wherein the mass of the filler in each region is the ratio of the mass of the ceramic in each region to the ignition loss of the powder; according to the filling powder mass, the powder apparent density and the area of the region, the filling height H of the region is calculated according to the following formula: H = (M/rho)/S, H is the filling height, M is the filling powder mass of the region, rho is the powder apparent density, and S is the area of the region; according to the calculation result of the above steps, a partition filling jig is designed; adding powder with corresponding mass into the respective corresponding areas by using the partitioned filling jig; adding a graphite base plate, and performing hot pressed sintering on the electrostatic chuck ceramic plate; and sintering the discharged ceramic block, and detecting the flatness.
本发明公开了一种提高静电卡盘陶瓷板烧结平整度的方法，属于静电卡盘陶瓷板烧结技术领域，所述方法包括：计算出各区域的陶瓷质量；得出粉料的烧失量比例；计算各区域填料的质量，各个区域填粉的质量为各区域陶瓷质量与粉料烧失量的比；根据填粉质量、粉料松装密度，以及区域面积大小，计算出该区域填料高度H，填料高度H通过下述公式计算：H＝(M/ρ)/S其中，H为填料高度，M为该区域的填粉质量，ρ为粉料松装密度，S为区域面积；根据上述步骤的计算结果，设计分区填料治具；使用所述分区填料治具，在各自对应的区域中加入相应质量的粉体；加石墨垫板，对静电卡盘陶瓷板进行热压烧结；烧结出炉的陶瓷块，检测平整度。
Method for improving sintering flatness of electrostatic chuck ceramic plate
一种提高静电卡盘陶瓷板烧结平整度的方法
HE DONGSHUANG (Autor:in) / SHI ZHEYUAN (Autor:in) / LI JUN (Autor:in) / DAI YI (Autor:in) / CHEN SHUSHU (Autor:in) / XIAO WEI (Autor:in)
12.11.2024
Patent
Elektronische Ressource
Chinesisch
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