Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Indium tin zinc oxide target material with high mobility and preparation method thereof
The embodiment of the invention discloses an indium tin zinc oxide target material with high mobility and a preparation method thereof. The method comprises the step of carrying out two-step oscillation pressure sintering treatment on spherical granules prepared from In2O3 powder, ZnO powder, SnO2 powder and metal oxide-doped powder, and specifically comprises the following steps: pre-pressing the spherical granulation powder in a mold under a first pressure; heating the pre-pressed spherical granulation powder to a first temperature; linearly increasing a first pressure applied to the mold to a second pressure before the temperature reaches the first temperature; performing first heat preservation at the first temperature and the second pressure; in the first heat preservation stage, the superposition frequency is 1-2 Hz, and the oscillation pressure is 5-10 MPa; maintaining the second pressure and cooling to a second temperature; performing second-time heat preservation at second temperature and second pressure, and applying oscillation pressure with the same size and frequency as the first-time heat preservation stage; after the second heat preservation stage is finished, heating is stopped, the external oscillation pressure is removed, and the temperature is reduced to 1000 DEG C; and cooling to room temperature along with the furnace.
本发明实施例公开了具有高迁移率的氧化铟锡锌靶材及其制备方法；方法包括对利用In2O3粉体、ZnO粉体、SnO2粉体以及掺杂金属氧化物粉体制备的球形造粒进行两步振荡压力烧结处理的步骤，具体包括：球形造粒粉在模具中在第一压力下预压；将预压的球形造粒粉加热至第一温度；在温度到达第一温度之前将施加到模具上的第一压力线性增加至第二压力；在第一温度、第二压力下执行第一次保温；在第一次保温阶段叠加频率为1～2Hz、振幅为5～10MPa的振荡压力；维持第二压力降温至第二温度；在第二温度、第二压力下执行第二次保温，施加与第一次保温阶段同样大小和频率的振荡压力；第二次保温阶段结束后，停止加热，去除外加振荡压力，降温至1000℃；然后随炉冷却至室温。
Indium tin zinc oxide target material with high mobility and preparation method thereof
The embodiment of the invention discloses an indium tin zinc oxide target material with high mobility and a preparation method thereof. The method comprises the step of carrying out two-step oscillation pressure sintering treatment on spherical granules prepared from In2O3 powder, ZnO powder, SnO2 powder and metal oxide-doped powder, and specifically comprises the following steps: pre-pressing the spherical granulation powder in a mold under a first pressure; heating the pre-pressed spherical granulation powder to a first temperature; linearly increasing a first pressure applied to the mold to a second pressure before the temperature reaches the first temperature; performing first heat preservation at the first temperature and the second pressure; in the first heat preservation stage, the superposition frequency is 1-2 Hz, and the oscillation pressure is 5-10 MPa; maintaining the second pressure and cooling to a second temperature; performing second-time heat preservation at second temperature and second pressure, and applying oscillation pressure with the same size and frequency as the first-time heat preservation stage; after the second heat preservation stage is finished, heating is stopped, the external oscillation pressure is removed, and the temperature is reduced to 1000 DEG C; and cooling to room temperature along with the furnace.
本发明实施例公开了具有高迁移率的氧化铟锡锌靶材及其制备方法；方法包括对利用In2O3粉体、ZnO粉体、SnO2粉体以及掺杂金属氧化物粉体制备的球形造粒进行两步振荡压力烧结处理的步骤，具体包括：球形造粒粉在模具中在第一压力下预压；将预压的球形造粒粉加热至第一温度；在温度到达第一温度之前将施加到模具上的第一压力线性增加至第二压力；在第一温度、第二压力下执行第一次保温；在第一次保温阶段叠加频率为1～2Hz、振幅为5～10MPa的振荡压力；维持第二压力降温至第二温度；在第二温度、第二压力下执行第二次保温，施加与第一次保温阶段同样大小和频率的振荡压力；第二次保温阶段结束后，停止加热，去除外加振荡压力，降温至1000℃；然后随炉冷却至室温。
Indium tin zinc oxide target material with high mobility and preparation method thereof
具有高迁移率的氧化铟锡锌靶材及其制备方法
WANG ZHIJUN (Autor:in) / XUE JIANSHE (Autor:in) / DU WENJING (Autor:in) / SUN BENSHUANG (Autor:in) / LIU MIAO (Autor:in) / WANG CHENGDUO (Autor:in) / CHEN JIE (Autor:in) / LIU YANG (Autor:in) / ZENG XUEYUN (Autor:in)
15.10.2024
Patent
Elektronische Ressource
Chinesisch
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