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    Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

    New search for: UMEDA KEIICHI
    New search for: AKIYAMA MORITO
    New search for: NAGASE TOSHIMI
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    New search for: HONDA ATSUSHI

    A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

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    Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

    New search for: UMEDA KEIICHI
    New search for: AKIYAMA MORITO
    New search for: NAGASE TOSHIMI
    New search for: NISHIKUBO KEIKO
    New search for: HONDA ATSUSHI

    A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

    Access

    Download

    Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

    New search for: UMEDA KEIICHI
    New search for: AKIYAMA MORITO
    New search for: NAGASE TOSHIMI
    New search for: NISHIKUBO KEIKO
    New search for: HONDA ATSUSHI

    A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

    Access

    Download

    Access

    Download

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

    Contributors:

    UMEDA KEIICHI (author) / AKIYAMA MORITO (author) / NAGASE TOSHIMI (author) / NISHIKUBO KEIKO (author) / HONDA ATSUSHI (author)

    Publication date:

    2019-11-12

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H10N / C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / G10K Tonerzeugungsvorrichtungen , SOUND-PRODUCING DEVICES / H03H IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS , Scheinwiderstandsnetzwerke, z.B. Resonanzkreise

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